GE QH1200T3/CL Halogen Bulbs Exploding in High Vacuum Sputter Deposition System

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Why are GE QH1200T3/CL halogen heat lamps exploding and occasionally melting the lead wires in a 10^-6 torr sputter deposition chamber?

The most likely cause is overheating in this particular machine: the bulbs work in other machines, but here they are being run hotter and for longer, and in a vacuum they lose convection cooling so they depend mostly on radiant cooling [#21664446][#21664447][#21664445] Try lowering the lamp voltage and/or adding more lamps to achieve the same heat load, and see whether the failures stop [#21664445][#21664447] If possible, measure bulb temperature directly, because the chamber may make them run much hotter than the process-point temperatures you already monitor [#21664445][#21664447] Also check for fingerprints or other contamination on the quartz, since halogen bulbs can fail from oils, and inspect the lamp sockets and leads for loose connections or arcing, which can overheat and melt the wires [#21664442][#21664441]

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Vacuum conditions may be overheating the halogen bulbs
#1 21664439 31 Oct 2012 14:35

Cody Tappan Cody Tappan

Anonymous

Vacuum conditions may be overheating the halogen bulbs
Post #1 21664439 31 Oct 2012 14:35

Hello all:

I've been running in to a peculiar problem at work the last few days. We have a set of heating bulbs in one of our machines that keep exploding during our industrial process.

The heater bank itself consists of 16 halogen heat lamps wired in parallel. The bulb in question is GE lighting's QH1200T3/CL bulb, rated for 144V, 1200W, 350 deg C.

We are running the bank with a Sorrenson 160/158 power supply in voltage control mode, at about 130V and 128A total, or 1040W per bulb.

The machine itself is a high vaccuum machine in the 10^-6 torr range doing long throw sputter deposition. We cannot see inside to look at the bulbs as they break, but we can observe the change in resistivity of the load as bulbs go out.

We also occassionally see melted wires... despite the fact that we have a good safety factor on our lead wires going to the bank. We are using 12 AWG nichrome coated copper multi stranded wire, with fiberglass insulation rated to 500+ deg C. On top of that, we have added insulating ceramic beads.

Any thoughts as to what could cause something like this?
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#2 21664440 31 Oct 2012 16:45

Sarah Harris Sarah Harris

Anonymous

Post #2
21664440 31 Oct 2012 16:45

are they exposed to the high vacuum ? they look like standard heat lamps and i doubt they are designed for such a hostile environment if they are
TVS diode test for intermittent supply faults
#3 21664441 31 Oct 2012 16:53

Stephen Van Buskirk Stephen Van Buskirk

Anonymous

TVS diode test for intermittent supply faults
Post #3 21664441 31 Oct 2012 16:53

I have no real idea but it won't stop me from guessing:

I assume that the power supply has been tested. A quick way to check for intermittent high voltage across a bad supply would be a TVS rated just above the output voltage, the smaller the better. If it's damaged that would point to a bad supply.

Is it possible that something from the sputter deposition is getting on the bulbs? I've heard - possibly urban myth - that even oil from greasy fingers can cause halogen bulbs to break. It seems to me that the melted wires could occur if the filament shorts when it breaks, though the wires should last much longer than the filament. In that case they're a secondary effect not related to the initial problem.
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Loose connections and fingerprints can cause halogen tube failure
#4 21664442 31 Oct 2012 17:11

Sarah Harris Sarah Harris

Anonymous

Loose connections and fingerprints can cause halogen tube failure
Post #4 21664442 31 Oct 2012 17:11

years ago i worked as an onsite service engineer for a manufacturer of halogen heaters, in my experience finger prints are a sure fire way for tubes to fail. melted wires close to the tube are caused by loose connections / connection springs loose etc causing arcing and excess heat. The arcing can also add what i can only describe as a "harmonic" which causes the filament to vibrate excessively and fail prematurely although this shouldnt cause them to explode. but excessive heating from a loose connection could especially if the heat generated is enough to melt 500deg wire thermal expansion et-al
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Heat sag may weaken quartz bulbs before implosion
#5 21664443 31 Oct 2012 19:53

Cody Tappan Cody Tappan

Anonymous

Heat sag may weaken quartz bulbs before implosion
Post #5 21664443 31 Oct 2012 19:53

I actually had a similar thought. It came to my attention that the bulbs get hot enough in some machines we have to start to sag over the months of use we get out of them... and we are talking a quartz outer shell here. Thats no small amount of heat, to be releasing the stress in quartz based material (definitely above the operating temp spec). It's entirely likely that the pressure differential is enough to pop them inside the machine, given that they are a little weakened by the heat already... Thanks!
Current overshoot and finger contamination suspected
#6 21664444 31 Oct 2012 20:01

Cody Tappan Cody Tappan

Anonymous

Current overshoot and finger contamination suspected
Post #6 21664444 31 Oct 2012 20:01

We actually have a meter across the load on this machine, complete with datalogger. Looking back at the system there is very little over-shoot in the voltage, with a decent amount of overshoot in the current. Sometimes as high as 20A over the equilibrium point.

As to the sputtering: It is out of the line of sight, so I don't expect we would see anything significant in terms of sputtered material on the bulbs. We might get some occasional debris when we vent to atmosphere, but nothing too out of the ordinary.

But I didn't know that about the greasy fingers... I wonder if the bulbs got touched in the process of installation, I definitely wouldn't doubt it. I know I've touched one or two with my fingers in my time there... Oops! I'll make sure to let everyone know that one.
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Lower lamp voltage and monitor bulb temperature
#7 21664445 01 Nov 2012 10:51

Steve Lawson Steve Lawson

Anonymous

Lower lamp voltage and monitor bulb temperature
Post #7 21664445 01 Nov 2012 10:51

Also consider that in the partial vacuum of the chamber, there is a lose of convection cooling which means the bulbs rely more on radiant cooling to draw heat away from them. Try running the lamps at a lower voltage and see if they stop exploding. Also, if you can get your hands on some wireless temperature probes and use them to monitor the temperature of the bulbs both while at normal atmosphere and at 10^-6 torr and see if there is a significant difference.

If running them at a lower voltage does the trick, then consider adding a few more lamps to make up the difference in heat volume.
Machine-specific cause likely from contamination or handling
#8 21664446 01 Nov 2012 11:02

Stephen Van Buskirk Stephen Van Buskirk

Anonymous

Machine-specific cause likely from contamination or handling
Post #8 21664446 01 Nov 2012 11:02

I was thinking about this (sometimes it even works) and realized you said the problem occurs in one of your machines, which I think means that the other machines are OK. In that case all the general questions, such as whether the bulbs will tolerate a vacuum, are answered by the bulbs working in the other machines. The answer lies in what makes this machine different. It could even be something as simple as a single blown bulb, followed by replacing the bulb without being careful about fingerprints. This would create an ongoing problem particular to that machine.
Bulb overheating likely from longer high-power operation
#9 21664447 01 Nov 2012 12:28

Cody Tappan Cody Tappan

Anonymous

Bulb overheating likely from longer high-power operation
Post #9 21664447 01 Nov 2012 12:28

Indeed! They do work in other machines, so in some capacity they are definitely OK in vacuum.

The main difference in this machine is that we are running them considerably hotter than in other machines. We are running at a similar operating point, but for significantly longer. Unfortunately we do not currently have a way of measuring the temp at the bulbs directly... we only measure temp at the points we are interested in from a product point of view. Installing something to monitor and limit bulb temperature will be my next step, I think.
Preheating halogen filaments may prevent bulb fracture
#10 21664448 03 Nov 2012 15:15

Mark Harrington Mark Harrington

Anonymous

Preheating halogen filaments may prevent bulb fracture
Post #10 21664448 03 Nov 2012 15:15

Very silly question perhaps, but I noticed this on design using halogen bulbs on would you believe a light scanner and couldnt work out why there was an initial voltage present on the bulbs before switch on, although strictly speaking they were biased on, but not enough to see light emmision

I came to the conclusion that what they were doing was preheating the elements inside the bulb reason being that from cold for example, If they were turned on fast the elements inside the bulbs would fracture "heating to fast sudden extreme changes in temperature"

Also on cooling down you are bound to get condensation forming which would also aspire to blowing bulbs You come across this quite often in security lamps this is a common problem No preheat of filament to bring halogen bulbs up to starting temperature before firing

Examples Street lighting uses this preheat cycle

Very similar to zero cross mains detectors to ensure filament switched on at the correct phase i.e just above or below zero volts rather than suddenly halfway through the cycle

examples light dimmer circuits no zero crossing detectors implemented especially old types of dimmer circuits

I wonder if this is related to your problem that you are experiancing

Just a suggestion which might answer this

Respectfully
.
Mark Harrington
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Topic summary

A set of 16 GE QH1200T3/CL halogen bulbs rated at 144V, 1200W, and 350°C are used in parallel as a heater bank within a high vacuum sputter deposition system operating at approximately 10^-6 torr. The bulbs are powered by a Sorrenson 160/158 power supply in voltage control mode at about 130V and 128A total, delivering roughly 1040W per bulb. The bulbs have been repeatedly exploding during operation, with occasional melted wires observed despite using 12 AWG nichrome-coated copper multi-stranded wire with fiberglass insulation rated above 500°C. Potential causes discussed include exposure of standard halogen bulbs to high vacuum conditions, loss of convection cooling leading to reliance on radiant cooling, and thermal stress on quartz envelopes causing weakening and rupture. Fingerprints or contamination on bulbs during installation may cause premature failure due to localized overheating. Loose electrical connections can cause arcing, filament vibration, and excessive heating, potentially leading to wire melting. Voltage overshoot is minimal, but current overshoot up to 20A occurs. The problem is specific to one machine where bulbs run hotter and longer than in others, suggesting thermal management and temperature monitoring as next steps. Suggestions include lowering operating voltage to reduce bulb temperature, adding more lamps to maintain heat output, and implementing wireless temperature probes to compare bulb temperatures in vacuum versus atmosphere. Preheating filaments to avoid thermal shock and condensation-related failures was also mentioned as a preventive measure.
AI summary based on the discussion. May contain errors.

GE QH1200T3/CL Halogen Bulbs Exploding in High Vacuum Sputter Deposition System

Why are GE QH1200T3/CL halogen heat lamps exploding and occasionally melting the lead wires in a 10^-6 torr sputter deposition chamber?

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