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Creating MIM Capacitors: Structure, Silicon Nitride Dielectric Film & Insulator Layers

vermes 8706 0
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  • #1 14024180
    vermes
    Level 8  
    A MIM capacitor is different than other capacitors mainly because of its unusual structure. Metal-insulator-metal capacitor (as its name indicates) includes an insulator – layer of dielectric film made of silicon nitride between two electrodes (top and bottom electrode). The dielectric layer consists of a number of bonds made of silicon and hydrogen as well as nitride and hydrogen ones. A ratio of silicon-hydrogen bonds to the other ones does not exceed the number of 0.5.

    The obtained value of capacitance in this type of capacitors is usually very accurate. However, they need more space than standard ones, because of the thicker insulator layer between two metal layers. While designing a layout with the use of MIM capacitors, remember to allow them more space.

    MIM capacitors can be the subject of an interesting study and further research, as some kinds of them can be made using different insulating materials and scientific methods, as well as methods of its fabrication. It is possible to obtain MIM capacitors with even better quality of features than their original ones, such as high-density and low-leakage current, ones operating in extremely high temperatures. Variety of possible results may give an excellent substitute for already existing capacitors.
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