Silicide in CMOS fabrication: Purpose and typical sheet resistance values explained

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#1 21659700 02 Sep 2011 02:04

Ningappa S Ningappa S

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Post #1
21659700 02 Sep 2011 02:04

Why is it used and what is the sheet resistance?
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#2 21659701 24 Mar 2014 19:30

Emmanuel Galleto Emmanuel Galleto

Anonymous

Post #2
21659701 24 Mar 2014 19:30

Hi Ningappa.,

this might help http://www.slideshare.net/mehulmatrix/silicides-review
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