Depth of Focus in Semiconductor Lithography and Its Relation to Resolution

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#1 21681986 26 Feb 2019 14:26

Ryan Mco Ryan Mco

Anonymous

Post #1
21681986 26 Feb 2019 14:26

Hi guys, Can someone please explain to me what does it mean the "depth of focus" in semiconductors-lithography? and how depth of focus related to resolution! thanks alot
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#2 21681987 26 Feb 2019 18:00

Caleb Strone Caleb Strone

Anonymous

Post #2
21681987 26 Feb 2019 18:00

if we will look at this website https://edureviewer.com/services/grabmyessay-com-review/, where the designer made special attention at logo place and identity of whole composition you will admite "depth of focus"
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#3 21681988 27 Feb 2019 09:50

Richard Gabric Richard Gabric

Anonymous

Post #3
21681988 27 Feb 2019 09:50

There is an interesting paper here, which may help you, it appeared in 1997, there have possibly been subsequent papers that may define it some what differently, since the lithographic methods used have changed of necessity to accommodate the every changing design rules over the intervening years,cheers,Richard
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#4 21681989 12 Mar 2019 15:48

Roy Jennifer Roy Jennifer

Anonymous

Post #4
21681989 12 Mar 2019 15:48

When considering resolution in optical microscopy, a majority of the emphasis is placed on point-to-point lateral resolution in the plane perpendicular to the optical axis (Figure 1). Another important aspect to resolution is the axial (or longitudinal) resolving power of an objective, which is measured parallel to the optical axis and is most often referred to as depth of field.
#5 21681990 18 Jan 2022 07:57

Timothy Lyall Timothy Lyall

Anonymous

Post #5
21681990 18 Jan 2022 07:57

thanks
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Depth of Focus in Semiconductor Lithography and Its Relation to Resolution

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